TY - JOUR AU - Maslar, James E. AU - Kimes, William A. AU - Khromchenko, Vladimir B. AU - Sperling, Brent AU - Kanjolia, Ravindra C2 - Journal of Crystal Growth DA - 2023-04-01 04:04:00 DO - https://doi.org/10.1016/j.jcrysgro.2023.127102 LA - en M1 - 607 PB - Journal of Crystal Growth PY - 2023 TI - Comparison of saturator designs for low volatility liquid precursor delivery UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935461 ER -