TY  - JOUR
AU  - Ding, Yifu
AU  - Hyun, 
AU  - Zhou, Jing
AU  - Okerberg, Brian
AU  - Douglas, Jack
AU  - Karim, Alamgir
AU  - Soles, Christopher
C2  - Advanced Functional Materials
DA  - 2008-06-10
LA  - en
M1  - 18
PB  - Advanced Functional Materials
PY  - 2008
TI  - Nanoimprint Lithography and the Role of Viscoelasticity in the Generation of Residual Stress in Model Polystyrene Patterns
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854115
ER  -