TY - JOUR AU - Moxim, Stephen AU - Ashton, James P AU - Anders, Mark AU - Ryan, Jason C2 - Journal of Applied Physics DA - 2023-04-12 04:04:00 DO - https://doi.org/10.1063/5.0145937 LA - en M1 - 133 PB - Journal of Applied Physics PY - 2023 TI - Combining Electrically Detected Magnetic Resonance Techniques to Study Atomic-Scale Defects Generated by Hot-Carrier Stressing in HfO2/SiO2/Si Transistors UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=936117 ER -