TY  - JOUR
AU  - Hurley, Donna
AU  - Shen, K
AU  - Jennett, N
AU  - Turner, J
C2  - Journal of Applied Physics
DA  - 2003-08-01
LA  - en
M1  - 94
PB  - Journal of Applied Physics
PY  - 2003
TI  - Atomic Force Acoustic Microscopy Methods to Determine Thin-Film Elastic Properties
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851331
ER  -