TY  - JOUR
AU  - Hyun, 
AU  - Ding, Yifu
AU  - Lee, Hae-Jeong
AU  - Hines, Daniel
AU  - Jones, Ronald
AU  - Lin, Eric
AU  - Karim, Alamgir
AU  - Wu, Wen-Li
AU  - Soles, Christopher
C2  - Journal of Vacuum Science and Technology B
DA  - 2006-11-30
LA  - en
M1  - 24
PB  - Journal of Vacuum Science and Technology B
PY  - 2006
TI  - Evidence for Internal Stresses Induced by Nanoimprint Lithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852638
ER  -