TY  - JOUR
AU  - Hyun, 
AU  - Peng, H
AU  - Nihara, Ken-ich
AU  - Lee, Hae-Jeong
AU  - Lin, Eric
AU  - Karim, Alamgir
AU  - Gidley, D
AU  - Jinai, Hiropshi
AU  - Yoon, Do
AU  - Soles, Christopher
C2  - Advanced Materials
DA  - 2008-04-15
LA  - en
M1  - 20
PB  - Advanced Materials
PY  - 2008
TI  - Self-Sealing Nanoporous Low-k Dielectric Patterns Created by Nanoimprint Lithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852758
ER  -