TY  - JOUR
AU  - Hyun, 
AU  - Jones, Ronald
AU  - Peng, H
AU  - Hines, Daniel
AU  - Lee, Hae-Jeong
AU  - Lin, Eric
AU  - Karim, Alamgir
AU  - Yoon, Do
AU  - Gidley, D
AU  - Soles, Christopher
C2  - Advanced Materials
DA  - 2007-10-02
LA  - en
M1  - 19
PB  - Advanced Materials
PY  - 2007
TI  - The Direct Patterning of Nanoporous Interlayer Dielectric Insulator Films by Nanoimprint Lithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852642
ER  -