TY - JOUR AU - Chang, Kao-Shuo AU - Green, Martin AU - Suehle, John AU - Vogel, Eric AU - Xiong, Hao AU - Hattrick-Simpers, Jason AU - Takeuchi, Ichiro AU - Famodu, O AU - Ohnaka, K AU - Chikyow, T AU - Majhi, Prashant AU - Lee, B AU - Gardner, M C2 - Applied Physics Letters DA - 2006-10-02 LA - en M1 - 89 PB - Applied Physics Letters PY - 2006 TI - Combinatorial Study of Ni-Ti-Pt Ternary Metal Gate Electrodes on HfO2 for the Advanced Gate Stack UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=850953 ER -