TY - JOUR AU - Prabhu, Vivek AU - Sambasivan, S AU - Fischer, Daniel AU - Sundberg, Linda AU - Allen, Robert C2 - Applied Surface Science DA - 2006-05-09 LA - en M1 - 253 PB - Applied Surface Science PY - 2006 TI - Quantitative Depth Profiling of Photoacid Generators in Photoresist Materials by Near-Edge X-Ray Absorption Fine Structure Spectroscopy UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852582 ER -