TY  - JOUR
AU  - Prabhu, Vivek
AU  - Jones, Ronald
AU  - Lin, Eric
AU  - Wu, Wen-Li
C2  - Journal of Vacuum Science and Technology B
DA  - 2003-08-01
LA  - en
M1  - 21
PB  - Journal of Vacuum Science and Technology B
PY  - 2003
TI  - Polyelectrolyte Effects in Model Photoresist Developer Solutions
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852091
ER  -