TY  - CONF
AU  - VanderHart, David
AU  - Prabhu, Vivek
AU  - De, Anuja
AU  - Felix, Nelson
AU  - Ober, Christopher
C2  - Proceedings of SPIE, San Jose, CA
DA  - 2008-02-22
LA  - en
M1  - 6923
PB  - Proceedings of SPIE, San Jose, CA
PY  - 2008
TI  - The Effect of EUV Molecular Glass Architecture on the Bulk Dispersion of a Photo-Acid Generator
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853578
ER  -