TY  - SER
AU  - Jones, Ronald
AU  - Prabhu, Vivek
AU  - Goldfarb, D
AU  - Lin, Eric
AU  - Soles, Christopher
AU  - Lenhart, Joseph~undefined~undefined~undefined~undefined~undefined
AU  - Wu, Wen-Li
AU  - Angelopoulos, M
C2  - American Chemical Society, Washington DC, DC
DA  - 2004-07-01
LA  - en
M1  - 874
PB  - American Chemical Society, Washington DC, DC
PY  - 2004
TI  - Correlation of the Reaction Front With Roughness in Chemically Amplified Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852147
ER  -