TY  - CONF
AU  - Jones, Ronald
AU  - Hu, T
AU  - Prabhu, Vivek
AU  - Soles, Christopher
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Goldfarb, D
AU  - Angelopoulos, M
C2  - CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY: 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, TX
DA  - 2003-09-01
LA  - en
M1  - 683
PB  - CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY: 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, TX
PY  - 2003
TI  - Form of Deprotection in Chemically Amplified Resists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852161
ER  -