TY  - JOUR
AU  - Kang, Shuhui
AU  - Prabhu, Vivek
AU  - Vogt, B
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Turnquest, Karen
C2  - Polymer
DA  - 2006-06-25
LA  - en
M1  - 47
PB  - Polymer
PY  - 2006
TI  - Effect of Copolymer Composition on Acid Catalyzed Deprotection Reaction Kinetics in Model Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852623
ER  -