TY  - JOUR
AU  - Hurley, Donna
AU  - Geiss, Roy
AU  - Jennett, N
AU  - Kopycinska-Mueller, Malgorzata
AU  - Maxwell, A
AU  - Mueller, Jens
AU  - Read, David
AU  - Wright, J
C2  - Journal of Materials Research
DA  - 2005-05-31
LA  - en
M1  - 20
PB  - Journal of Materials Research
PY  - 2005
TI  - Acoustical methods to determine thin-film and nanoscale mechanical properties
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50075
ER  -