TY  - JOUR
AU  - Ding, Yifu
AU  - Hyun, 
AU  - Germer, Thomas
AU  - Douglas, Jack
AU  - Okerberg, Brian
AU  - Karim, Alamgir
AU  - Soles, Christopher
C2  - ACS Nano
DA  - 2007-08-14
LA  - en
M1  - 1
PB  - ACS Nano
PY  - 2007
TI  - Relaxation Behavior of Polymer Structures Fabricated by Nanoimprint Lithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852744
ER  -