TY  - CONF
AU  - Prabhu, Vivek
AU  - Vogt, B
AU  - Wu, Wen-Li
AU  - Douglas, Jack
AU  - Satija, Sushil
AU  - Goldfarb, D
AU  - Ito, H
C2  - Proceedings of SPIE, San Jose, CA
DA  - 2005-03-01
LA  - en
M1  - 5753
PB  - Proceedings of SPIE, San Jose, CA
PY  - 2005
TI  - Interfacial Structure of Photoresist Thin Films in Developer Solutions
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852460
ER  -