TY  - JOUR
AU  - Wu, Wen-Li
AU  - Wallace, William
C2  - SPIE series
DA  - 1998-07-01
LA  - en
M1  - 3426
PB  - SPIE series
PY  - 1998
TI  - Characterization of Planarity of Polymer Thin Films on Rough Surfaces
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851479
ER  -