TY  - JOUR
AU  - Ding, Yifu
AU  - Hyun, 
AU  - Douglas, Jack
AU  - Jones, Ronald
AU  - Hines, Daniel
AU  - Karim, Alamgir
AU  - Soles, Christopher
C2  - Advanced Materials
DA  - 2007-05-24
LA  - en
M1  - 19
PB  - Advanced Materials
PY  - 2007
TI  - Polymer Viscoelasticity and Residual Stress Effects on Nanoimprint Lithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852665
ER  -