TY  - CONF
AU  - Prabhu, Vivek
AU  - Jones, Ronald
AU  - Lin, Eric
AU  - Soles, Christopher
AU  - Wu, Wen-Li
AU  - Goldfarb, D
AU  - Angelopoulos, M
C2  - Proceedings of SPIE, Santa Clara, CA
DA  - 2003-01-01
LA  - en
M1  - 5039
PB  - Proceedings of SPIE, Santa Clara, CA
PY  - 2003
TI  - Polyelectrolyte Effects in Model Photoresist Developer Solutions: Roles of Base Concentration and Added Salts
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853867
ER  -