TY  - GEN
AU  - Dagata, John
AU  - Yokoyama, H
AU  - Perez-murano, F
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2003-01-01
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2003
TI  - Workshop Summary Report: Scanning Probe Nanolithography Workshop
ER  -