TY  - CONF
AU  - Orji, Ndubuisi
AU  - Martinez, Angela
AU  - Dixson, Ronald
AU  - Allgair, J
C2  - Proceedings of SPIE, San Jose, CA
DA  - 2006-03-01
LA  - en
M1  - 6152
PB  - Proceedings of SPIE, San Jose, CA
PY  - 2006
TI  - Progress on Implementation of a CD-AFM Based Reference Measurement System
ER  -