TY  - GEN
AU  - Villarrubia, John
AU  - Vladar, Andras
AU  - Postek, Michael
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2004-01-01
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2004
TI  - Shape-Sensitive Linewidth Measurements of Resist Structures
ER  -