TY - CONF AU - Zhou, Hui AU - Damazo, Bradley AU - Gonda, S AU - Silver, Richard C2 - Proceedings American Society for Precision Engineering, Orlando, FL DA - 2003-10-01 LA - en PB - Proceedings American Society for Precision Engineering, Orlando, FL PY - 2003 TI - Developing Atomic-Resolution Measurements Using a Tunable Diode Laser-Based Interferometer ER -