TY  - CONF
AU  - Dixson, Ronald
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Guthrie, William
AU  - Park, Brandon
AU  - Murabito, Christine
AU  - Martinez, Joaquin
C2  - SEMATECH Internal Report, Unknown, TX
DA  - 2004-01-01
LA  - en
PB  - SEMATECH Internal Report, Unknown, TX
PY  - 2004
TI  - Interim Report on Single Crystal Critical Dimension Reference Materials (SCCDRM)
ER  -