TY - JOUR AU - Estler, William AU - Sawyer, Daniel AU - Borchardt, Bruce AU - Phillips, Steven C2 - The Journal of the CMSC DA - 2006-01-01 LA - en M1 - 1 PB - The Journal of the CMSC PY - 2006 TI - Large-Scale Metrology Instrument Performance Evaluations at NIST ER -