TY  - CONF
AU  - Song, Jun-Feng
AU  - Ma, Lijun
AU  - Vorburger, Theodore
C2  - Proceedings of 2006 American Society of Precision Engineering, Monterey, CA
DA  - 2006-01-01
LA  - en
PB  - Proceedings of 2006 American Society of Precision Engineering, Monterey, CA
PY  - 2006
TI  - The Effect of Gaussian Filter Long Wavelength Cutoff in Topography Comparisons and Measurements
ER  -