TY  - JOUR
AU  - Rhee, Hyug-Gyo
AU  - Vorburger, Theodore
AU  - Lee, Jonathan
AU  - Fu, Joseph
C2  - Applied Optics
DA  - 2005-10-01
LA  - en
M1  - 44
PB  - Applied Optics
PY  - 2005
TI  - Discrepancies Between Roughness Measurements Obtained With Phase Shifting and White-Light Interferometry
ER  -