TY  - CONF
AU  - Barnes, Bryan
AU  - Howard, Lowell
AU  - Lipscomb, P
AU  - Silver, Richard
C2  - Proceedings of SPIE, San Jose, CA
DA  - 2007-03-01
LA  - en
M1  - 6518
PB  - Proceedings of SPIE, San Jose, CA
PY  - 2007
TI  - Zero-Order Imaging of Device-Sized Overlay Targets Using Scatterfield Microscopy
ER  -