TY  - JOUR
AU  - Dixson, Ronald
AU  - Allen, Richard
AU  - Guthrie, William
AU  - Cresswell, Michael
C2  - J. Vacuum Sci. Technol. B
DA  - 2005-01-01
LA  - en
M1  - 23
PB  - J. Vacuum Sci. Technol. B
PY  - 2005
TI  - Traceable Calibration of Critical-Dimension Atomic Force Microscope Linewidth Measurements with Nanometer Uncertainty
ER  -