TY  - CONF
AU  - Postek, Michael
AU  - Vladar, Andras
AU  - Kramar, John
AU  - Stern, L
AU  - Notte, John
AU  - McVey, Sean
C2  - Proceedings of SPIE, San Diego, CA
DA  - 2007-09-10
LA  - en
M1  - 6648
PB  - Proceedings of SPIE, San Diego, CA
PY  - 2007
TI  - Instrumentation, Metrology, and Standards for Nanomanufacturing
ER  -