TY  - JOUR
AU  - Postek, Michael
AU  - Vladar, Andras
AU  - Bennett, Marylyn
AU  - Rice, T
AU  - Knowles, R
C2  - Journal of Microlithography Microfabrication and Microsystems
DA  - 2004-04-01
LA  - en
M1  - 3
PB  - Journal of Microlithography Microfabrication and Microsystems
PY  - 2004
TI  - Photomask Dimensional Metrology in the SEM Part II: High-Pressure/Environmental Scanning Electron Microscope
ER  -