TY  - CONF
AU  - Song, Jun-Feng
AU  - Vorburger, Theodore
C2  - Proceedings of SPIE, San Diego, CA
DA  - 2007-09-01
LA  - en
M1  - 6672
PB  - Proceedings of SPIE, San Diego, CA
PY  - 2007
TI  - A Novel Parameter Proposed for 2D and 3D Topography Measurements and Comparisons
ER  -