TY  - JOUR
AU  - Villarrubia, John
AU  - Vladar, Andras
AU  - Postek, Michael
C2  - Surface and Interface Analysis
DA  - 2005-04-01
LA  - en
M1  - 37
PB  - Surface and Interface Analysis
PY  - 2005
TI  - Scanning Electron Microscope Dimensional Metrology Using a Model-Based Library
ER  -