TY  - CONF
AU  - Dixson, Ronald
AU  - Tsai, V
AU  - Vorburger, Theodore
AU  - Williams, Edwin
AU  - Wang, X
AU  - Fu, Joseph
AU  - Koning, R
C2  - Proceedings of American Society for Precision Engineering, Unknown, USA
DA  - 1998-01-01
LA  - en
PB  - Proceedings of American Society for Precision Engineering, Unknown, USA
PY  - 1998
TI  - Measurements of Pitch, Height, and Width Artifacts with the NIST Calibrated Atomic Force Microscope
ER  -