TY  - CONF
AU  - Zhao, Xuezeng
AU  - Vorburger, Theodore
AU  - Fu, Joseph
AU  - Song, Jun-Feng
AU  - Nguyen, C
C2  - Proceedings of American Institute of Physics International Conference on Characterization and Metrology: 2003 International Conference (AIP Conference Proc. 683), edited by D.G. Seiler, et al. (Amer. Inst. Phys, Woodbury NY), Austin, TX
DA  - 2003-01-01
LA  - en
M1  - 683
PB  - Proceedings of American Institute of Physics International Conference on Characterization and Metrology: 2003 International Conference (AIP Conference Proc. 683), edited by D.G. Seiler, et al. (Amer. Inst. Phys, Woodbury NY), Austin, TX
PY  - 2003
TI  - A Model for Step Height, Edge Slope and Linewidth Measurements Using AFM
ER  -