TY  - CONF
AU  - Orji, Ndubuisi
AU  - Vorburger, Theodore
AU  - Gu, Xiaohong
AU  - Raja, Jayaraman
C2  - Proceedings of American Society for Precision Engineering 2003 Annual Meeting, Raliegh, NC
DA  - 2003-01-01
LA  - en
PB  - Proceedings of American Society for Precision Engineering 2003 Annual Meeting, Raliegh, NC
PY  - 2003
TI  - Scale-Space Analysis of Line Edge Roughness on 193 nm Lithography Test Structures
ER  -