TY  - CONF
AU  - Tsai, V
AU  - Vorburger, Theodore
AU  - Dixson, Ronald
AU  - Fu, Joseph
AU  - Koning, R
AU  - Silver, Richard
AU  - E., 
C2  - 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD
DA  - 1998-01-01
LA  - en
PB  - 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD
PY  - 1998
TI  - The Study of Silicon Stepped Surfaces as Atomic Force Microscope Calibration Standards With a Calibrated AFM at NIST
ER  -