TY  - JOUR
AU  - Marx, Egon
AU  - Malik, I
AU  - Bristow, T
AU  - Poduje, N
AU  - Stover, J
AU  - Strausser, Y
AU  - Weber, M
C2  - Journal of Vacuum Science and Technology
DA  - 2002-01-01
LA  - en
M1  - 20
PB  - Journal of Vacuum Science and Technology
PY  - 2002
TI  - Power Spectral Densities: A Multiple Technique Study of Different Si Wafer Surfaces
ER  -