TY  - JOUR
AU  - Villarrubia, John
AU  - Vladar, Andras
AU  - Postek, Michael
C2  - Journal of Microlithography Microfabrication and Microsystems
DA  - 2005-07-01
LA  - en
M1  - 4
PB  - Journal of Microlithography Microfabrication and Microsystems
PY  - 2005
TI  - A Simulation Study of Repeatability and Bias in the CD-SEM
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822536
ER  -