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Charlie Tarrio received his BS from Bates College in Lewiston, Maine, and Ph.D. in physics from the University of Virginia. He has been at NIST since 1991 developing at-wavelength EUV metrology and studying properties and contamination of EUV optics.
In 2019, after decades of effort, manufacturers used a new technology to create smartphones with individual circuit features as small as 7 nanometers (nm), or