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Physical Measurement Laboratory / Quantum Sensors Division

Quantum Calorimeters Group

Projects/Programs

Displaying 1 - 4 of 4
TKID devices

Kinetic Inductance Spectrophotometry

Ongoing
Within this application space, the transition-edge sensor (TES) microcalorimeter is the most mature technology, with demonstrated x-ray energy resolving capabilities of better than a part per thousand. Current TES readout techniques require the use of superconducting quantum interference device
scanning electron microscope

Microcalorimeter Spectrometers for X-ray and Gamma-ray Spectroscopy

Ongoing
The Quantum Calorimeters Project in the Quantum Sensors Group develops and applies sensors that detect the energy of single photons or particles. For example, Transition-Edge Sensors (TESs) are able to measure the energy of single x-ray and gamma-ray photons with a precision better than one part per
Nanoscale, Element-Specific X-ray Imaging for Integrated Circuit Metrology

Nanoscale, Element-Specific X-ray Imaging for Integrated Circuit Metrology

Ongoing
Industry roadmaps identify the characterization of nanoscale subsurface feature shape and composition as a measurement need for the semiconductor industry. However, IC interiors are difficult to probe post-manufacturing due to the presence of many close-packed and nanoscale subsurface features, of