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Nanotechnology / Nanofabrication / manufacturing

Lithography

Tools and Instruments

Keyword

Organizational Unit

NanoFab Tool: JEOL JBX 6300-FS Direct Write Electron Beam Lithography System

The JEOL JBX 6300-FS direct write electron beam lithography system allows users to quickly and directly pattern a variety of substrate materials with feature

NanoFab Tool: Suss MicroTec MA/BA6 Gen4 Mask Aligner

The SUSS MicroTec MA/BA6 contact aligner allows users to align patterns on the front or back of a substrate and to print feature sizes down to 1 µm. The tool