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Nanotechnology

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New Microlithography Method May Shrink Computer Chips Yet Again

August 31, 1995

A new form of microlithography that uses neutral atoms instead of light to write patterns on silicon has been demonstrated at the Commerce Department's National

Technology Transfer Activity as a “Concierge Service” to the Scientific and Engineering Community

Commercialization Academy Director for Venture Partners of the University of Colorado, Boulder, Ms. Sally Hatcher, who is my colleague and fellow Technology

NIST Headquarters
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