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2018 Bronze Medal Award
Kimes, Maslar, Sperling
AWARD CITATION
The team is recognized for developing in-situ optical diagnostics that improve in-line chemical process measurements. Using an advanced high-speed chemical imaging system, the team quantified, differentiated, and followed chemical species in deposition chambers under manufacturing conditions. The diagnostics provide superior fabrication control for better nanoelectronic device quality and yield. The team also designed and implemented a dedicated optical-based monitor for identifying chemical species at two orders-of-magnitude enhanced sensitivity. These improvements bring manufacturers closer to achieving the stringent size and power requirements of the next generation of consumer electronic products.