Berc Kalanyan

Publications

Nanocalorimetry for plasma metrology relevant to semiconductor fabrication

February 4, 2025

Author(s)

John Diulus, Carles Corbella Roca, Feng Yi, David LaVan, Berc Kalanyan, Mark McLean, Lakshmi Ravi Narayan, William Osborn, James Maslar, Andrei Kolmakov

This letter reports on pilot tests of microfabricated nanocalorimeters as a metrology platform for the rapid (sub-100 ms response time) and sensitive detection

X-ray Characterization of a Metal-organic Framework During Dehydration and CO2 Adsorption

June 1, 2023

Author(s)

Evan Jahrman, Huong Giang Nguyen, Berc Kalanyan

X-ray absorption spectroscopies are well-established for the purpose of interrogating the structure about metal sites. Often, these methods also exhibit

Common Single-Use Consumer Plastic Products Release Trillions of Sub-100 nm Nanoparticles per Liter into Water during Normal Use

April 20, 2022

Author(s)

Christopher D. Zangmeister, James Radney, Kurt D. Benkstein, Berc Kalanyan

This study demonstrates that commonly used consumer products such as single-use food grade nylon bags and hot beverage cups lined with low-density polyethylene

Atomic layer deposition of MoS2 films using bis(tert-butylimido)-bis(dimethylamido)molybdenum and 1-propanethiol

December 31, 2018

Author(s)

Berc Kalanyan, Ryan Beams, Michael B. Katz, Albert Davydov, James E. Maslar, Ravindra Kanjolia

Proposed commercial applications using transition metal dichalcogenide (TMD) semiconductors such as MoS2 rely on unique material properties that are only

Evaluation of silicon wafer-based internal reflection elements for use with in situ FT-IR spectroscopy

September 1, 2018

Author(s)

Brent A. Sperling, Berc Kalanyan

Silicon wafer-based internal reflection elements (IREs) present many practical advantages over the prisms conventionally used for attenuated total reflection

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Berc Kalanyan (Fed)

Publications