Pfluger, M.
, Kline, R.
, Fernandez Herrero, A.
, Hammerschmidt, M.
, Soltwisch, V.
and Krumrey, M.
(2020),
Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS, Journal of Micro/Nanolithography, MEMS, and MOEMS, [online], https://doi.org/10.1117/1.JMM.19.1.014001, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929069
(Accessed December 18, 2024)
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Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS
Published
Author(s)
Mika Pfluger, , Analia Fernandez Herrero, Martin Hammerschmidt, Victor Soltwisch, Michael Krumrey
Citation
Journal of Micro/Nanolithography, MEMS, and MOEMS
Volume
19
Issue
1
Pub Type
Journals
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Created January 27, 2020, Updated October 12, 2021