Levine, Z.
, Alpert, B.
, Dagel, A.
, Fowler, J.
, Jiminez, E.
, Nakamura, N.
, Swetz, D.
, Szypryt, P.
, Thompson, K.
and Ullom, J.
(2023),
A Tabletop X-Ray Tomography Instrument for Nanometer-Scale Imaging: Reconstructions, Microsystems & Nanoengineering, [online], https://doi.org/10.1038/s41378-023-00510-6, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935457
(Accessed November 23, 2024)
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A Tabletop X-Ray Tomography Instrument for Nanometer-Scale Imaging: Reconstructions
Published
Author(s)
, , Amber Dagel, , Edward Jiminez, , , , Kyle Thompson,
Abstract
We show three-dimensional reconstructions of a region of an integrated circuit from a 130 nm copper process. The reconstructions employ x-ray computed tomography, measured with a new and innovative high-magnification x-ray microscope. The instrument uses a focused electron beam to generate x-rays in a 100 nm spot and energy-resolving x-ray detectors that minimize backgrounds and hold promise for the identification of materials within the sample. The x-ray generation target, a layer of platinum, is fabricated on the circuit wafer itself. A region of interest is imaged from a limited range of angles and without physically removing the region from the larger circuit. The reconstruction is consistent with the circuit's design file.Citation
Microsystems & Nanoengineering
Volume
9
Pub Type
Journals
Download Paper
Keywords
Tomography , integrated circuit interconnects , x-ray microscope
Citation
Issues
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Created April 14, 2023