Potzick, J.
(1997),
Standard Reference Materials ::Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems/, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.260-129
(Accessed January 3, 2025)
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Standard Reference Materials ::Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems/
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- NIST SP 260-129
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NIST SP 260-129
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NIST Pubs
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Created January 1, 1997, Updated May 20, 2023