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PUBLICATIONS

2013 ITRS Metrology Roadmap

Published

Author(s)

Alain C. Diebold, Ndubuisi George Orji

Abstract

In 2013 the ITRS Metrology Technical Working Group worked on updating the text and tables of the metrology chapter. New additions include a section on 3D nanometrology, a revised lithography metrology table, and an updated Interconnect section. The difficult challenges table was revised to reflect current metrology needs and opportunities. This article discusses the new updates for 2013.
Citation
Apptheneum
Pub Weblink
Pub Type
Websites

Keywords

ITRS, Metrology, Roadmap, Lithography
Standards, Nanometrology and Metrology

Citation

Diebold, A. and Orji, N. (2014), 2013 ITRS Metrology Roadmap, Apptheneum, [online], www.apptheneum.com (Accessed January 14, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created April 14, 2014, Updated October 12, 2021